Description

The dramatic rise in the use of all types of high-purity gases has been driven by the process requirements for advanced device manufacturing. In order to achieve and maintain the high purities required of these gases, the selection of appropriate filters for bulk and point-of-use applications is absolutely essential. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint. Entegris' ultrapure gas filtration products are used by all major semiconductor OEMs and device makers in etch, CVD, PVD and ion implantation tools as well as other high-performance applications such as photovoltaics, flat panel display, data storage and HBLED (high brigtness light emitting diodes), life sciences and lithium ion battery.